UHV-Sputtering & Ar-ion Milling systems |
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UHV-Sputtering System
5-target Suputtering、Ar-ion Milling、Vacuum Vapor Deposition System with the Wedge/Annealing system
Brillouin Light Scattering System |
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Micro-focused Brillouin Light Scattering Spectroscopy:Tandem(3+3)Fabry-Perot Interferometer、XYZ piezo stage、Active Table.
RF Signal generator、Sampling Oscilloscope、Fast Pulse Generator PSPL10070A、Fast Digitizer、Pulse Pattern Generator.
Micro-focused Kerr microscope system |
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Micro-focused Kerr microscopy:XYZ stage、active table
RF Signal generator、Sampling Oscilloscope、Fast Pulse Generator PSPL10070A、Fast Digitizer、Pulse Pattern Generator.
High Frequency Prober System |
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micro-probing system(DC−40 GHz):In-plane XY magnetic field
Vector Network Analyzer、Sampling Oscilloscope、Realtime Oscilloscope
Ultrafast Pulse generator PSPL10070A, High Power Pulse generator PSPL10300B
RF signal generator、Pulse Pattern Generator、DC-Current/Voltage Source、DigitalMultiMeter、2-phase Lock-in Amplifier
Maskless Laser lithograpy & Microfabrication Equipment |
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Maskless Laser Lithograpy、Ductless Fume Hood、Spin Coater, Optical Microscope(x5〜x100)
Mechanical Fabrication Machines |
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CNC Milling machine、3D-Printer &3D-Scannter、CNC Winding Machine