| UHV-Sputtering & Ar-ion Milling systems | |
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UHV-Sputtering System
5-target Suputtering、Ar-ion Milling、Vacuum Vapor Deposition System with the Wedge/Annealing system
| Brillouin Light Scattering System | |
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<wavevector-resolved BLS、phase-resolved BLS、time-resolved BLS>
Micro-focused Brillouin Light Scattering Spectroscopy:Tandem(3+3)Fabry-Perot Interferometer、XYZ piezo stage、Active Table.
RF Signal generator、Sampling Oscilloscope、Fast Pulse Generator PSPL10070A、Fast Digitizer、Pulse Pattern Generator.
| Micro-focused Kerr microscope system | |
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Micro-focused Kerr microscopy:XYZ stage、active table
RF Signal generator、Sampling Oscilloscope、Fast Pulse Generator PSPL10070A、Fast Digitizer、Pulse Pattern Generator.
| High Frequency Prober System | |
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micro-probing system(DC−40 GHz):In-plane XY magnetic field
Vector Network Analyzer、Sampling Oscilloscope、Realtime Oscilloscope
Ultrafast Pulse generator PSPL10070A, High Power Pulse generator PSPL10300B
RF signal generator、Pulse Pattern Generator、DC-Current/Voltage Source、DigitalMultiMeter、2-phase Lock-in Amplifier
| Maskless Laser lithograpy & Microfabrication Equipment | |
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Maskless Laser Lithograpy、Ductless Fume Hood、Spin Coater, Optical Microscope(x5〜x100)
| Mechanical Fabrication Machines | |
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CNC Milling machine、3D-Printer &3D-Scannter、CNC Winding Machine